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Resonant MEMS
Fundamentals, Implementation, and Application
Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata, Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse
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eBook - ePub
Resonant MEMS
Fundamentals, Implementation, and Application
Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata, Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse
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About This Book
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
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