A User's Guide to Ellipsometry
eBook - ePub

A User's Guide to Ellipsometry

  1. 272 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

A User's Guide to Ellipsometry

About this book

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

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Yes, you can access A User's Guide to Ellipsometry by Harland G. Tompkins in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Engineering General. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Title Page
  2. Copyright Page
  3. Table of Contents
  4. Preface
  5. Chapter 1 - Theoretical Aspects
  6. Chapter 2 - Instrumentation
  7. Chapter 3 - Using Optical Parameters to Determine Material Properties
  8. Chapter 4 - Determining Optical Parameters for Inaccessible Substrates and Unknown Films
  9. Chapter 5 - Extremely Thin Films
  10. Chapter 6 - The Special Case of Polysilicon
  11. Chapter 7 - The Effect of Roughness
  12. CASE STUDIES
  13. Appendices
  14. INDEX
  15. Astronomy
  16. DOVER BOOKS ON ENGINEERING