The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world's leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved.

New in the Third Edition

In addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography.

The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition.

Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.

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Yes, you can access Microlithography by Bruce W. Smith, Kazuaki Suzuki, Bruce W. Smith,Kazuaki Suzuki in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over one million books available in our catalogue for you to explore.

Information

Publisher

Year

Print ISBN

eBook ISBN

Edition

Topic

Technology & Engineering

Subtopic

Electrical Engineering & Telecommunications

Index

Technology & Engineering

Cover
Half-Title
Title
Copyright
Contents
Preface to Third Edition
Editors
Contributors
Chapter 1 Lithography, Etch, and Silicon Process Technology
Chapter 2 Optical Nanolithography
Chapter 3 Multiple Patterning Lithography
Chapter 4 EUV Lithography
Chapter 5 Alignment and Overlay
Chapter 6 Design for Manufacturing and Design Process Technology Co-Optimization
Chapter 7 Chemistry of Photoresist Materials
Chapter 8 Photoresist and Materials Processing
Chapter 9 Optical Lithography Modeling
Chapter 10 Maskless Lithography
Chapter 11 Imprint Lithography
Chapter 12 Metrology for Nanolithography
Chapter 13 Directed Self-Assembly of Block Copolymers
Index

About this book

Frequently asked questions

Information

Table of contents