- 400 pages
- English
- ePUB (mobile friendly)
- Available on iOS & Android
eBook - ePub
Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing
About this book
As science pushes closer toward the atomic size scale, new challenges arise to slow the pace of the miniaturization that has transformed our society and fueled the information age. New technologies are necessary to surpass these obstacles and realize the tremendous growth predicted by Moore's law. Assembled from the works of pioneering researchers, Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing presents new developments and technologies for producing the next generation of electronic circuits and displays.
This book introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the existing molecule-reaction-based technologies. It systematically details the procedures and underlying concepts involved in wet process technologies and applications. Following an introduction to semiconductor surface chemical electronics, expert contributors discuss the principles and technology of high-performance wet cleaning; etching technologies and processes; antistatic technology; wet vapor resist stripping technology; and process and safety technologies including waste reclamation, chemical composition control, and ultrapure water and liquid chemical supply systems and materials for fluctuation-free facilities.
Currently, large production runs are needed to balance the costs of acquiring and tuning equipment for specialized operating conditions. Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing explains the technologies and processes used to meet the demand for variety and low volumes that exists in today's digital electronics marketplace.
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Please note we cannot support devices running on iOS 13 and Android 7 or earlier. Learn more about using the app.
Yes, you can access Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing by Tadahiro Ohmi in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Optics & Light. We have over one million books available in our catalogue for you to explore.
Information
Topic
Physical SciencesSubtopic
Optics & LightTable of contents
- Cover
- Half Title
- Title Page
- Copyright Page
- Preface
- About the Editor
- Contributors
- Table of Contents
- Chapter 1 Surface Chemical Electronics at the Semiconductor Surface
- Chapter 2 Principles of Semiconductor Device Wet Cleaning
- Chapter 3 High-Performance Wet Cleaning Technology
- Chapter 4 Etching of Various SiO2
- Chapter 5 Silicon Etching
- Chapter 6 Chemical Composition Control Technology
- Chapter 7 Wet Vapor Resist Stripping Technology
- Chapter 8 Antistatic Technology
- Chapter 9 Chemical Waste Reclamation Technology
- Chapter 10 Advanced Ultrapure Water and Liquid Chemical Supply System and Materials for Fluctuation-Free Facility
- Index