
Metrology and Diagnostic Techniques for Nanoelectronics
- 1,454 pages
- English
- ePUB (mobile friendly)
- Available on iOS & Android
Metrology and Diagnostic Techniques for Nanoelectronics
About this book
Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.
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Information
Table of contents
- Cover
- Half Title
- Title Page
- Copyright Page
- Table of Contents
- Preface
- Introduction
- Section 1 Characterization and Metrology for MOS Devices and Interconnects
- Section 2 Characterization Techniques for Novel Materials and Devices beyond CMOS
- Section 3 Electrical Characterization and Reliability Testing Techniques
- Section 4 Characterization and Metrology for 3D Stacked Die/ Package Interconnections
- Section 5 Circuit Diagnostic and Probing Techniques
- Index