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Metrology and Diagnostic Techniques for Nanoelectronics
Metrology and Diagnostic Techniques for Nanoelectronics
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Metrology and Diagnostic Techniques for Nanoelectronics

Zhiyong Ma, David G. Seiler
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1,454 pages
language
English
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Metrology and Diagnostic Techniques for Nanoelectronics

Zhiyong Ma, David G. Seiler
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About This Book

Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.

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Information

Publisher
Jenny Stanford Publishing
Year
2017
ISBN
9781351733946
Topic
Physical Sciences
Subtopic
Physics
Edition
1

Table of contents