Nano- and Micro-Electromechanical Systems
eBook - ePub

Nano- and Micro-Electromechanical Systems

Fundamentals of Nano- and Microengineering, Second Edition

  1. 744 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

Nano- and Micro-Electromechanical Systems

Fundamentals of Nano- and Microengineering, Second Edition

About this book

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.

Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.

Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

Frequently asked questions

Yes, you can cancel anytime from the Subscription tab in your account settings on the Perlego website. Your subscription will stay active until the end of your current billing period. Learn how to cancel your subscription.
No, books cannot be downloaded as external files, such as PDFs, for use outside of Perlego. However, you can download books within the Perlego app for offline reading on mobile or tablet. Learn more here.
Perlego offers two plans: Essential and Complete
  • Essential is ideal for learners and professionals who enjoy exploring a wide range of subjects. Access the Essential Library with 800,000+ trusted titles and best-sellers across business, personal growth, and the humanities. Includes unlimited reading time and Standard Read Aloud voice.
  • Complete: Perfect for advanced learners and researchers needing full, unrestricted access. Unlock 1.4M+ books across hundreds of subjects, including academic and specialized titles. The Complete Plan also includes advanced features like Premium Read Aloud and Research Assistant.
Both plans are available with monthly, semester, or annual billing cycles.
We are an online textbook subscription service, where you can get access to an entire online library for less than the price of a single book per month. With over 1 million books across 1000+ topics, we’ve got you covered! Learn more here.
Look out for the read-aloud symbol on your next book to see if you can listen to it. The read-aloud tool reads text aloud for you, highlighting the text as it is being read. You can pause it, speed it up and slow it down. Learn more here.
Yes! You can use the Perlego app on both iOS or Android devices to read anytime, anywhere — even offline. Perfect for commutes or when you’re on the go.
Please note we cannot support devices running on iOS 13 and Android 7 or earlier. Learn more about using the app.
Yes, you can access Nano- and Micro-Electromechanical Systems by Sergey Edward Lyshevski in PDF and/or ePUB format, as well as other popular books in Tecnología e ingeniería & Ingeniería eléctrica y telecomunicaciones. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Cover
  2. Half Title
  3. Title Page
  4. Copyright Page
  5. Original Copyright Page
  6. Dedication
  7. Table of Contents
  8. 1 Nano- and Microscience, Engineering, and Technology
  9. 2 Nano- and Microscale Systems, Devices, and Structures
  10. 3 Nano- and Microsystems: Classification and Consideration
  11. 4 Fundamentals of Microfabrication and MEMS Fabrication Technologies
  12. 5 Devising and Synthesis of NEMS and MEMS
  13. 6 Modeling of Micro- and Nanoscale Electromechanical Systems and Devices
  14. 7 Quantum Mechanics and Its Applications
  15. 8 Molecular and Carbon Nanoelectronics
  16. 9 Control of MEMS and NEMS
  17. 10 Examples in Synthesis, Analysis, Design and Fabrication of MEMS
  18. Index