Handbook of Silicon Semiconductor Metrology

Alain C. Diebold

• Publisher: CRC Press
• Year: 2001
• Edition: 1
• eBook ISBN:
  9780203904541
• Topic: Technology & Engineering
• Subtopic: Electrical Engineering & Telecommunications
• Index: Technology & Engineering

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

Table of contents

• Cover
• Title
• Copyright
• Dedication
• Preface
• Acknowledgments
• Contents
• Contributors
• 1 Silicon Semiconductor Metrology
• 2 Gate Dielectric Metrology KLA-Tencor Corporation, San Jose, California
• 3 Metrology for Ion Implantation
• 4 MOS Device Characterization
• 5 Carrier Illumination Characterization of Ultra-Shallow Implants
• 6 Modeling of Statistical Manufacturing Sensitivity and of Process Control and Metrology Requiremen ...
• 7 Overview of Metrology for On-Chip Interconnect
• 8 Metrology for On-Chip Interconnect Dielectrics
• 9 Thin-Film Metrology Using Impulsive Stimulated Thermal Scattering (ISTS)
• 10 Metal Interconnect Process Control Using Picosecond Ultrasonics
• 11 Sheet Resistance Measurements of Interconnect Films
• 12 Characterization of Low-Dielectric Constant Materials
• 13 High-Resolution Profilometry for CMP and Etch Metrology
• 14 Critical-Dimension Metrology and the Scanning Electron Microscope
• 15 Scanned Probe Microscope Dimensional Metrology
• 16 Electrical CD Metrology and Related Reference Materials
• 17 Metrology of Image Placement
• 18 Scatterometry for Semiconductor Metrology
• 19 Unpatterned Wafer Defect Detection
• 20 Particle and Defect Characterization
• 21 Calibration of Particle Detection Systems
• 22 In Situ Metrology
• 23 Metrology Data Management and Information Systems
• 24 Statistical Metrology, with Applications to Interconnect and Yield Modeling
• 25 Physics of Optical Metrology of Silicon-Based Semiconductor Devices
• 26 Ultraviolet, Vacuum Ultraviolet, and Extreme Ultraviolet Spectroscopic Reflectometry and Ellipso ...
• 27 Analysis of Thin-Layer Structures by X-Ray Reflectometry
• 28 Ion Beam Methods
• 29 Electron Microscopy-Based Measurement of Feature Thickness and Calibration of Reference Materials
• 30 Status of Lithography Metrology as of the End of 2000
• Index