- 430 pages
- English
- PDF
- Available on iOS & Android
eBook - PDF
Crystal Growth and Evaluation of Silicon for VLSI and ULSI
About this book
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemical
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Yes, you can access Crystal Growth and Evaluation of Silicon for VLSI and ULSI by Golla Eranna in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Physics. We have over one million books available in our catalogue for you to explore.
Information
Table of contents
- Front Cover
- Dedication
- Contents
- Preface
- About the Author
- Chapter 1 Introduction
- Chapter 2 Silicon: The Key Material for Integrated Circuit Fabrication Technology
- Chapter 3 Importance of Single Crystals for Integrated Circuit Fabrication
- Chapter 4 Different Techniques for Growing Single-Crystal Silicon
- Chapter 5 From Silicon Ingots to Silicon Wafers
- Chapter 6 Evaluation of Silicon Wafers
- Chapter 7 Resistivity and Impurity Concentration Mapping of Silicon Wafers
- Chapter 8 Impurities in Silicon Wafers
- Chapter 9 Defects in Silicon Wafers
- Chapter 10 Silicon Wafer Preparation for VLSI and ULSI Processing
- Chapter 11 Packing of Silicon Wafers
- Back Cover