[PDF] Ultra-Clean Technology Handbook Volume 1: Ultra-Pure Water by Ohmi | Perlego
Get access to over 650,000 titles
Start your free trial today and explore our endless library.
Start free trial
Join perlego now to get access to over 650,000 books
Join perlego now to get access to over 650,000 books
Ultra-Clean Technology Handbook
Ultra-Clean Technology Handbook
Unavailable in your region

Ultra-Clean Technology Handbook

Volume 1: Ultra-Pure Water
Ohmi
Start free trial
shareBook
Share book
pages
944 pages
language
English
format
ePUB (mobile friendly)
availableOnMobile
Available on iOS & Android
Unavailable in your region

Ultra-Clean Technology Handbook

Volume 1: Ultra-Pure Water
Ohmi
Book details
Table of contents

About This Book

Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int

Read More

Information

Publisher
CRC Press
Year
2017
ISBN
9781351406420
Topic
Physical Sciences
Subtopic
Industrial & Technical Chemistry
Edition
1

Table of contents