III-V Integrated Circuit Fabrication Technology
eBook - PDF

III-V Integrated Circuit Fabrication Technology

  1. 706 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

III-V Integrated Circuit Fabrication Technology

About this book

GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III-V processing, with emphasis on HBTs. It is aimed at practicing

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Information

Publisher
Jenny Stanford Publishing
Year
2016
eBook ISBN
9789814669313
Topic
Physical Sciences
Subtopic
Biology

Table of contents

  1. Front Cover
  2. Contents
  3. Preface
  4. Acknowledgments
  5. Chapter 1: Semiconductor Basics
  6. Chapter 2: GaAs Devices
  7. Chapter 3: Phase Diagrams and Crystal Growth of Compound Semiconductors
  8. Chapter 4: Epitaxy
  9. Chapter 5: Photolithography
  10. Chapter 6: Wet Etching, Cleaning, and Passivation
  11. Chapter 7: Plasma Processing and Dry Etching
  12. Chapter 8: Deposition Processes
  13. Chapter 9: Ion Implantation and Device Isolation
  14. Chapter 10: Diffusion in III–V Compound Semiconductors
  15. Chapter 11: Ohmic Contacts
  16. Chapter 12: Schottky Diodes and FET Processing
  17. Chapter 13: HEMT Process
  18. Chapter 14: HBT Processing
  19. Chapter 15: BiFET and BiHEMT Processing
  20. Chapter 16: MOSFET Processing
  21. Chapter 17: Passive Components
  22. Chapter 18: Interconnect Technology
  23. Chapter 19: Backend Processing and Through-Wafer Vias
  24. Chapter 20: Electroplating
  25. Chapter 21: Measurements and Characterization
  26. Chapter 22: Reliability
  27. Chapter 23: GaN Devices
  28. Chapter 24: RF MEMS
  29. Appendix
  30. Acronyms
  31. Back Cover

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Yes, you can access III-V Integrated Circuit Fabrication Technology by Shiban Tiku, Dhrubes Biswas, Shiban Tiku,Dhrubes Biswas in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Biology. We have over 1.5 million books available in our catalogue for you to explore.