Handbook of Silicon Based MEMS Materials and Technologies
eBook - ePub

Handbook of Silicon Based MEMS Materials and Technologies

  1. 1,026 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

Handbook of Silicon Based MEMS Materials and Technologies

About this book

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Information

Publisher
Elsevier
Year
2020
Print ISBN
9780128177860
eBook ISBN
9780128177877
Edition
3
Topic
Tecnologia e ingegneria
Subtopic
Scienza dei materiali

Table of contents

  1. Cover image
  2. Title page
  3. Table of Contents
  4. Copyright
  5. List of contributors
  6. Preface
  7. Where is silicon based MEMS heading to?
  8. Part I: Silicon as MEMS Material
  9. Part II: Modeling in MEMS
  10. Part III: Micromachining Technologies in MEMS
  11. Part IV: Encapsulation and Integration of MEMS
  12. Part V: Characterization of MEMS
  13. Part VI: Process integration and case studies
  14. Index

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Yes, you can access Handbook of Silicon Based MEMS Materials and Technologies by Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos in PDF and/or ePUB format, as well as other popular books in Tecnologia e ingegneria & Scienza dei materiali. We have over 1.5 million books available in our catalogue for you to explore.