Developments in Surface Contamination and Cleaning, Volume 8

Cleaning Techniques

Rajiv Kohli, Kashmiri L. Mittal

• Publisher: William Andrew
• Year: 2014
• Print ISBN: 9780323299619
• eBook ISBN: 9780323312714
• Topic: Tecnología e ingeniería
• Subtopic: Gestión industrial

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area.Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R&D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography.- Provides a state-of-the-art survey and best-practice guidance for scientists and engineers engaged in surface cleaning or handling the consequences of surface contamination- Addresses the continuing trends of shrinking device size and contamination vulnerability in a range of industries, spearheaded by the semiconductor industry and others- Covers novel wet and dry surface cleaning methods of increasing commercial importance

Chapter 1

How Green and Does it Clean

Methodologies for Assessing Cleaning Products for Safety and Performance

Jason P. Marshall; Heidi Wilcox Toxics Use Reduction Institute, University of Massachusetts Lowell, Lowell, Massachusetts, USA

Abstract

Industrial surface cleaning is performed for a number of reasons. It may be required to prepare the surfaces of parts prior to manufacturing processes such as welding or painting. It may be performed for aesthetic reasons as an aid to marketing and sales. The cleaning process is imperative to perform well and changing from a proved process can seem daunting. However, the change is sometimes necessary as many cleaning products contain harmful chemicals that can have serious adverse effects. Therefore, a systematic method for assessing environmental, health, and safety is an important step in the selection process. There are many tools that exist to make this an easier task. Once a safer alternative is identified, performance testing is needed because if a product is green but does not work, then so what. Nobody is going to use it.

Solvents have been used for many years in all fields of cleaning and were often performed via single-species vapor degreasing operation. This streamlined approach was due to traditional solvents’ superior ability to dissolve organic matter. The alternatives tend to not be one-size-fits-all type of solution and require performance verification. The problem with the way most people evaluate cleaning product effectiveness is that their comparisons tend to be subjective, not scientific. However, well-written test protocols and repeatable science needs to play a key role in choosing cleaning products that work consistently well. Combining these lab-based methods with in-field process-specific testing will result in the identification of safer and effective cleaning alternatives.

Keywords

Solvent cleaning

Alternatives assessment

Pollution prevention

Green cleaning

Standardized testing

Performance testing

Chapter Contents

1 Background 2

2 Environmental Concerns 3

3 Green Cleaning 3

4 Regulatory Aspects 6

5 Product Selection 8

6 Green Assessment—What Makes a Product Green? 9

6.1 Pollution Prevention Options Assessment Tool (P2OASys) 10

6.2 Green Screen 11

6.2.1 Human Health Group I 16

6.2.2 Human Health Group II and II* 16

6.2.3 Environmental Toxicity and Fate 16

6.2.4 Physical Hazards 16

6.2.5 Green Screen Process Steps 17

6.3 Environmental Protection Agency Design for the Environment 20

6.3.1 Acute Mammalian Toxicity 21

6.3.2 Carcinogenicity 21

6.3.3 Genetic Toxicity 21

6.3.4 Neurotoxicity 21

6.3.5 Repeated Dose Toxicity 21

6.3.6 Reproductive and Developmental Toxicity 21

6.3.7 Respiratory Sensitization 22

6.3.8 Skin Sensitization 22

6.3.9 Environmental Toxicity and Fate 22

6.3.10 Eutrophication 22

6.4 Green Seal™ Environmental Standard for Cleaning and Degreasing Agents (GS 34) 30

6.4.1 Toxic Compounds 30

6.4.2 Carcinogens and Reproductive Toxins 30

6.4.3 Corrosivity and Causticity 30

6.4.4 Skin and Eye Irritation 30

6.4.5 Flammability and Ignitability 30

6.4.6 VOC Content 31

6.4.7 Ozone Depletion 31

6.4.8 Toxicity to Aquatic Life 31

6.4.9 Aquatic Biodegradability 31

6.4.10 Eutrophication 31

6.4.11 Disposal 31

6.4.12 Animal Testing 31

6.5 Quick Guide for Tools 31

7 Performance Testing/Efficacy Evaluation 34

7.1 Basic Testing Process 36

7.1.1 Phase I Product Selection 36

7.1.2 Phase II Temperature and Concentration Studies 36

7.1.3 Phase III Mechanical Energy Studies 37

7.1.4 Phase IV Actual Product Cleaning Studies 38

7.1.5 Phase V Pilot Plant/Scale-Up Feasibility Studies 38

7.2 Case Studies 40

7.2.1 Case Study 1—Shedding Some Light on Laboratory Versus Field Practices 40

7.2.2 Case Study 2—Thinking Outside the Cable Box—Wire &...

Table of contents

• Cover image
• Title page
• Table of Contents
• Copyright
• Contributors
• Preface
• About the Editors
• Chapter 1: How Green and Does it Clean: Methodologies for Assessing Cleaning Products for Safety and Performance
• Chapter 2: UV-Ozone Cleaning for Removal of Surface Contaminants
• Chapter 3: Use of Water Ice for Removal of Surface Contaminants
• Chapter 4: Post-CMP Cleaning
• Chapter 5: A Brief Review of the Cleaning Process for Electronic Device Fabrication
• Index