Handbook of Silicon Based MEMS Materials and Technologies
eBook - ePub

Handbook of Silicon Based MEMS Materials and Technologies

  1. 826 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

Handbook of Silicon Based MEMS Materials and Technologies

About this book

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory

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Yes, you can access Handbook of Silicon Based MEMS Materials and Technologies by Markku Tilli,Mervi Paulasto-Kröckel,Teruaki Motooka,Veikko Lindroos in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Engineering General. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Cover image
  2. Title page
  3. Table of Contents
  4. Copyright
  5. List of Contributors
  6. Preface to the Second Edition
  7. Overview. Impact of Silicon MEMS—40 Years After
  8. Part I: Silicon as MEMS Material
  9. Part II: Modeling in MEMS
  10. Part III: Measuring MEMS
  11. Part IV: Micromachining Technologies in MEMS
  12. Part V: Encapsulation and Integration of MEMS
  13. Appendix 1. Common Abbreviations and Acronyms
  14. Appendix 2. Nanoindentation Characterization of Silicon and Other MEMS Materials
  15. Index