eBook - ePub
Thin Film Materials Technology
Sputtering of Compound Materials
- 532 pages
- English
- ePUB (mobile friendly)
- Available on iOS & Android
eBook - ePub
Thin Film Materials Technology
Sputtering of Compound Materials
About this book
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
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Yes, you can access Thin Film Materials Technology by Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Industrial Engineering. We have over one million books available in our catalogue for you to explore.
Information
Table of contents
- Cover image
- Title page
- Table of Contents
- Copyright
- Related Electronic Materials and Process Technology
- Preface
- Chapter 1: Thin Film Materials and Devices
- Chapter 2: Thin Film Processes
- Chapter 3: Sputtering Phenomena
- Chapter 4: Sputtering Systems
- Chapter 5: Deposition of Compound Thin Films
- Chapter 6: Structural Control of Compound Thin Films: Perovskite and Nanometer Oxide Thin Films
- Chapter 7: Microfabrication by Sputtering
- Appendix
- List of Acronyms
- Index