Handbook of Thin Film Deposition
eBook - PDF

Handbook of Thin Film Deposition

  1. 430 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Handbook of Thin Film Deposition

About this book

New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques.Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

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Yes, you can access Handbook of Thin Film Deposition by Krishna Seshan in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Materials Science. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Front Cover
  2. Handbook of Thin-Film Deposition: Processes and Techniques
  3. Copyright Page
  4. Contents
  5. Chapter 0 Recent Changes in the Semiconductor Industry
  6. Chapter 1 Deposition Technologies and Applications: Introduction and Overview
  7. Chapter 2 Silicon Epitaxy by Chemical Vapor Deposition
  8. Chapter 3 Chemical Vapor Deposition of Silicon Dioxide Films
  9. Chapter 4 Metal Organic Chemical Vapor Deposition: Technology and Equipment
  10. Chapter 5 Feature Scale Modeling
  11. Chapter 6 The Role Of Metrology And Inspection In Semiconductor Processing
  12. Chapter 7 Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing
  13. Chapter 8 Sputtering and Sputter Deposition
  14. Chapter 9 Laser and Electron Beam Assisted Processing
  15. Chapter 10 Molecular Beam Epitaxy: Equipment and Practice
  16. Chapter 11 Ion Beam Deposition
  17. Chapter 12 Chemical Mechanical Polishing
  18. Chapter 13 Organic Dielectrics in Multilevel Metallization of Integrated Circuits
  19. Chapter 14 Performance, Processing, and Lithography Trends
  20. Index