Handbook of Chemical Vapor Deposition
eBook - PDF

Handbook of Chemical Vapor Deposition

Principles, Technology and Applications

  1. 458 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Handbook of Chemical Vapor Deposition

Principles, Technology and Applications

About this book

Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.

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Yes, you can access Handbook of Chemical Vapor Deposition by Hugh O. Pierson in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Microelectronics. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Front Cover
  2. Handbook of Chemical Vapor Deposition(CVD): Principles, Technology and Applications
  3. Copyright Page
  4. Table of Contents
  5. MATERIALS SCIENCE AND PROCESS TECHNOLOGY SERIES
  6. FOREWORD
  7. PREFACE
  8. NOTICE
  9. CHAPTER 1. INTRODUCTION AND GENERAL CONSIDERATIONS
  10. CHAPTER 2. FUNDAMENTALS OF CHEMICAL VAPOR DEPOSITION
  11. CHAPTER 3. THE CHEMISTRY OF CVD
  12. CHAPTER 4. CVD PROCESSES AND EQUIPMENT
  13. CHAPTER 5. THE CVD OF METALS
  14. CHAPTER 6. THE CVD OF NON-METALLIC ELEMENTS AND SEMICONDUCTORS
  15. CHAPTER 7. THE CVD OF CERAMIC MATERIALS
  16. CHAPTER 8. CVD IN ELECTRONIC APPLICATIONS
  17. CHAPTER 9. CVD IN OPTOELECTRONICS AND OTHER ELECTRONICALLY RELATED APPLICATIONS
  18. CHAPTER 10. CVD IN OPTICAL APPLICATIONS
  19. CHAPTER 11. CVD IN WEAR-, EROSION-, AND CORROSION-RESISTANT APPLICATIONS
  20. CHAPTER 12. CVD IN FIBER, POWDER, AND MONOLITHIC APPLICATIONS
  21. APPENDIX: ALTERNATIVE PROCESSES FOR THIN-FILM DEPOSITION AND SURFACE MODIFICATION
  22. INDEX