
eBook - PDF
Materials Science in Microelectronics I
The Relationships Between Thin Film Processing and Structure
- 270 pages
- English
- PDF
- Available on iOS & Android
eBook - PDF
Materials Science in Microelectronics I
The Relationships Between Thin Film Processing and Structure
About this book
Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.
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Yes, you can access Materials Science in Microelectronics I by Eugene Machlin in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over one million books available in our catalogue for you to explore.
Information
Edition
2Table of contents
- Cover
- Materials Science in Microelectronics, Volume 1
- Contents
- Acknowledgement
- Foreword
- Preface
- Preface to revised edition
- Chapter I Deposition Parameters
- Chapter II Defect Structure
- Chapter III Grain Structure
- Chapter IV Epitaxial Structures
- Chapter V Structure of Amorphous Films
- Chapter VI Stresses in Thin Films
- Chapter VII Reaction-induced Structure
- Chapter VIII Surface Structure
- Index