- 1,173 pages
- English
- PDF
- Available on iOS & Android
eBook - PDF
Principles of Vapor Deposition of Thin Films
About this book
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.* Offers detailed derivation of important formulae.* Thoroughly covers the basic principles of materials science that are important to any thin film preparation.* Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.
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Information
Table of contents
- Front Cover
- Principles of Physical Vapor Deposition of Thin Films
- Copyright
- Contents
- Acknolowdgements
- Chapter 01 INTRODUCTION
- Chapter 02 EVAPORATION
- Chapter 03 PLASMA STATE
- Chapter 04 COLD PLASMA DISCHARGES
- Chapter 05 THERMAL EVAPORATION SOURCES
- Chapter 06 GAS FLOW IN THIN FILM PROCESSING SYSTEMS
- Chapter 07 SPECIAL SOURCES
- Chapter 08 GAS SOLID INTERACTIONS
- Chapter 09 NUCLEATION AND GROWTH OF FILMS
- Chapter 10 EPITAXY
- Chapter 11 SUBSTRATE PREPARATION
- Chapter 12 STRUCTURE AND PROPERTIES OF FILMS
- Chapter 13 DRY ETCHING
- Index
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Yes, you can access Principles of Vapor Deposition of Thin Films by Professor K.S. K.S Sree Harsha in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Physics. We have over 1.5 million books available in our catalogue for you to explore.