Interlayer Dielectrics for Semiconductor Technologies
eBook - PDF

Interlayer Dielectrics for Semiconductor Technologies

  1. 464 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Interlayer Dielectrics for Semiconductor Technologies

About this book

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.

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Yes, you can access Interlayer Dielectrics for Semiconductor Technologies by Shyam P Muraka,Moshe Eizenberg,Ashok K Sinha in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Electromagnetism. We have over one million books available in our catalogue for you to explore.

Information

Publisher
Academic Press
Year
2003
eBook ISBN
9780080521954
Topic
Physical Sciences
Subtopic
Electromagnetism

Table of contents

  1. Front Cover
  2. Interlayer Dielectrics for Semiconductor Technologies
  3. Copyright Page
  4. Contents
  5. Preface
  6. Acknowledgements
  7. List of Contributors
  8. Chapter 1. Introduction: interlayer dielectrics in microelectronic devices
  9. Chapter 2. Dielectric properties
  10. Chapter 3. Characterization of low dielectric constant materials
  11. Chapter 4. Compatibilities of dielectric films
  12. Chapter 5. Silicon-based dielectrics
  13. Chapter 6. Low-κ polymers
  14. Chapter 7. Chemical vapor deposition of C–F low-κ materials
  15. Chapter 8. Spin-on Si-based low-κ materials
  16. Chapter 9. Nanoporous dielectric films: fundamental property relations and microelectronics applications
  17. Chapter 10. High- dielectrics grown by atomic layer deposition: capacitor and gate applications
  18. Chapter 11. Dielectric materials in optical waveguide applications
  19. Chapter 12. Reliability
  20. Chapter 13. Future trends in silicon technologies
  21. Index