Methods of Surface Analysis

A.W. Czanderna

• Publisher: North Holland
• Year: 2012
• Print ISBN: 9780444413444
• eBook ISBN: 9780444596451
• Topic: Physical Sciences
• Subtopic: Energy

Methods of Surface Analysis deals with the determination of the composition of surfaces and the identification of species attached to the surface. The text applies methods of surface analysis to obtain a composition depth profile after various stages of ion etching or sputtering. The composition at the solid—solid interface is revealed by systematically removing atomic planes until the interface of interest is reached, in which the investigator can then determine its composition. The book reviews the effect of ion etching on the results obtained by any method of surface analysis including the effect of the rate of etching, incident energy of the bombarding ion, the properties of the solid, the effect of the ion etching on generating an output signal of electrons, ions, or neutrals. The text also describes the effect of the residual gases in the vacuum environment. The book considers the influence of the sample geometry, of the type (metal, insulator, semiconductor, organic), and of the atomic number can have on surface analysis. The text describes in detail low energy ion scattering spectroscopy, X-ray photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectroscopy, and infrared reflection-absorption spectroscopy. The book can prove useful for researchers, technicians, and scientists whose works involve organic chemistry, analytical chemistry, and other related fields of chemistry, such as physical chemistry or inorganic chemistry.

Table of contents

• Front Cover
• Methods of Surface Analysis
• Copyright Page
• Table of Contents
• Preface
• Introduction
• Chapter 1. The aspects of sputtering in surface analysis methods
• Chapter 2. A comparison of the methods of surface analysis and their applications
• Chapter 3. Low-energy ion scattering spectrometry
• Chapter 4. Surface analysis by X-ray photoelectron spectroscopy
• Chapter 5. Auger electron spectroscopy
• Chapter 6. Secondary ion mass spectrometry
• Chapter 7. The use of Auger electron spectroscopy and secondary ion mass spectrometry in the microelectronic technology
• Chapter 8. The atom-probe field ion microscope
• Chapter 9. Field ion mass spectrometry applied to surface investigations
• Chapter 10. Infrared reflection—absorption spectroscopy
• Index