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Ion Implantation Technology - 94
Ion Implantation Technology - 94
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Ion Implantation Technology - 94

S. Coffa, G. Ferla, E. Rimini, F. Priolo
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Ion Implantation Technology - 94

S. Coffa, G. Ferla, E. Rimini, F. Priolo
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About This Book

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.

The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

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Information

Publisher
Elsevier Science
Year
1995
ISBN
9780444599728
Topic
Physical Sciences
Subtopic
Optics & Light

Table of contents