- 260 pages
- English
- PDF
- Available on iOS & Android
eBook - PDF
A User's Guide to Ellipsometry
About this book
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
- Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications
- Provides comprehensive discussion of the measurement of film thickness and optical constants in film
- Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameter
- Includes 14 case studies to reinforce specific applications
- Includes three appendices for helpful references
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Please note we cannot support devices running on iOS 13 and Android 7 or earlier. Learn more about using the app.
Yes, you can access A User's Guide to Ellipsometry by Harland G. Tompkins in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Condensed Matter. We have over one million books available in our catalogue for you to explore.
Information
Table of contents
- Front Cover
- A User’s Guide to Ellipsometry
- Copyright Page
- Table of Contents
- Preface
- Chapter 1.Theoretical Aspects
- Chapter 2. Instrumentation
- Chapter 3. Using Optical Parameters to Determine Material Properties
- Chapter 4. Determining Optical Parameters for Inaccessible substrates and Unknown Films
- Chapter 5. Extremely Thin Films
- Chapter 6. The Special Case of Polysilicon
- Chapter 7. The Effect of Roughness
- Part1: Case Studies
- Appendices
- Index