Organometallic Vapor-Phase Epitaxy
eBook - PDF

Organometallic Vapor-Phase Epitaxy

Theory and Practice

  1. 398 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Organometallic Vapor-Phase Epitaxy

Theory and Practice

About this book

Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.

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Yes, you can access Organometallic Vapor-Phase Epitaxy by Gerald B. Stringfellow in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Inorganic Chemistry. We have over one million books available in our catalogue for you to explore.

Information

Table of contents

  1. Front Cover
  2. Organometallic Vapor-Phase Epitaxy: Theory and Practice
  3. Copyright Page
  4. Table of Contents
  5. Preface
  6. Glossary of Acronyms Used in Text
  7. Notation for Organometallic Precursor Molecules
  8. Chapter 1. Overview of the OMVPE Process
  9. Chapter 2. Source Molecules
  10. Chapter 3. Thermodynamics
  11. Chapter 4. Kinetics
  12. Chapter 5. Hydrodynamics and Mass Transport
  13. Chapter 6. Design of the OMVPE Process
  14. Chapter 7. Specific Materials
  15. Chapter 8. Superlattice Structures
  16. Chapter 9. Devices
  17. Index