
- 583 pages
- English
- PDF
- Available on iOS & Android
Handbook of Quality Integrated Circuit Manufacturing
About this book
Here is a comprehensive practical guide to entire wafer fabrication process from A to Z. Written by a practicing process engineer with years of experience, this book provides a thorough introduction to the complex field of IC manufacturing, including wafer area layout and design, yield optimization, just-in-time management systems, statistical quality control, fabrication equipment and its setup, and cleanroom techniques. In addition, it contains a wealth of information on common process problems: How to detect them, how to confirm them, and how to solve them. Whether you are a new enginner or technician just entering the field, a fabrication manager looking for ways to improve quality and production, or someone who would just like to know more about IC manufacturing, this is the book you're looking for.- Provides a readable, practical overview of the entire wafer fabrication process for new engineers and those just entering this complex field- Enables engineers and managers to improve production, raise quality levels, and solve problems that commonly occur in the fabrication process- Presents the latest techniques and gives special attention to Japanese IC manufacturing techniques, showing how they obtain outstanding quality
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Information
Table of contents
- Front Cover
- Handbook of Quality Integrated Circuit Manufacturing
- Copyright Page
- Table of Contents
- Dedication
- Preface
- CHAPTER 1. OVERVIEW OF SEMICONDUCTOR MANUFACTURING
- CHAPTER 2. YIELD OPTIMIZATION
- CHAPTER 3. METHODS OF SEMICONDUCTOR ANALYSIS
- CHAPTER 4. CLEANROOM FACILITIES AND PROCEDURES
- CHAPTER 5. WAFER CLEANING TECHNIQUES
- CHAPTER 6. PHOTOLITHOGRAPHY AND ETCH PROCESSES
- CHAPTER 7. THE DIFFUSION PROCESSES
- CHAPTER 8. LOW-PRESSURE CHEMICAL VAPOR DEPOSITION PROCESSES
- CHAPTER 9. ION IMPLANTATION PROCESSES
- CHAPTER 10. METAL FILM DEPOSITION PROCESSES
- CHAPTER 11. INTEGRATED CIRCUIT TESTING AND ANALYSIS
- CHAPTER 12. STATISTICAL QUALITY CONTROL
- CHAPTER 13. THE PEOPLE WHO MAKE THE CHIPS
- CHAPTER 14. FUTURE TRENDS AND CONCLUSIONS531
- APPENDIX A: HAZARDOUS CHEMICAL TOXICITY TABLE
- APPENDIX B: EXPERIMENT DESIGN FOR PROCESS AND PRODUCT DEVELOPMENT
- BIBLIOGRAPHY
- INDEX