
- 424 pages
- English
- PDF
- Available on iOS & Android
eBook - PDF
Nanolithography and Patterning Techniques in Microelectronics
About this book
Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications.A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices.With its distinguished international team of contributors, Non-conventional lithography and patterning is a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices.
- Looks at alternative approaches used to develop complex patterns at the nanoscale
- Concentrates on state of the art nanolithographic methods
- Written by a distinguished international team of contributors
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Information
Table of contents
- Cover
- Nanolithography and patterning techniques in microelectronics
- Copyright
- Contents
- Contributor contact details
- Preface
- 1 Block copolymer nanolithography
- 2 Surface-induced structure formation of polymer blends
- 3 Rapid prototyping of functional microfabricated devices by soft lithography
- 4 Chemomechanical surface modification of materials for patterning
- 5 Patterning of polymer thin films
- 6 Ion beam patterning
- 7 Nanofabrication by shadow deposition through nanostencils
- 8 Photolithography beyond the diffraction limit
- 9 Ink-jet printing as a tool in manufacturing and instrumentation
- 10 Actuators and patterns for microfluidic control
- 11 Manipulation of biomolecules and reactions
- 12 Nonlithographic patterning: application of inkjet printing in organic-based devices
- 13 High-resolution, printing techniques for plastic electronics
- Index
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Yes, you can access Nanolithography and Patterning Techniques in Microelectronics by D Bucknall in PDF and/or ePUB format, as well as other popular books in Biological Sciences & Biotechnology. We have over one million books available in our catalogue for you to explore.