Micro Electronic and Mechanical Systems
eBook - PDF

Micro Electronic and Mechanical Systems

  1. 526 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Micro Electronic and Mechanical Systems

About this book

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field.?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

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Yes, you can access Micro Electronic and Mechanical Systems by Kenichi Takahata in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Micro Electronic and Mechanical Systems
  2. Preface
  3. Contents
  4. Chapter 1 - Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice
  5. Chapter 2 - A Review of Thermoelectric MEMS Devices for Micro-power Generation, Heating and Cooling Applications
  6. Chapter 3 - Micro Power Generation from Micro Fuel Cell Combined with Micro Methanol Reformer
  7. Chapter 4 - Non-contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry
  8. Chapter 5 - Nanomembrane: A New MEMS/NEMS Building Block
  9. Chapter 6 - Nanomembrane-Enabled MEMS Sensors: Case of Plasmonic Devices for Chemical and Biological Sensing
  10. Chapter 7 - Specific Serum-free Conditions can Differentiate Mouse Embryonic Stem Cells into Osteochondrogenic and Myogenic Progenitors.
  11. Chapter 9 - Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators
  12. Chapter 10 - Micro-Electro-Discharge Machining Technologies for MEMS
  13. Chapter 11 - Mechanical Properties of MEMS Materials
  14. Chapter 12 - Reliability of MEMS
  15. Chapter 13 - Numerical Simulation of Plasma-Chemical Processing Semiconductors
  16. Chapter 14 - Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering
  17. Chapter 15 - Self-Aligned π-Shaped Source/Drain Ultrathin SOI MOSFETs
  18. Chapter 16 - Accurate LDMOS Model Extraction using DC,CV and Small Signal S Parameters Measurements for Reliability Issues
  19. Chapter 17 - Comparative Analysis of High Frequency Characteristics of DDR and DAR IMPATT Diodes
  20. Chapter 18 - Ohmic Contacts for High Power and High Temperature Microelectronics
  21. Chapter 19 - Implications of Negative Bias Temperature Instability in Power MOS Transistors
  22. Chapter 20 - Radiation Hardness of Semiconductor Programmable Memories and Over-voltage Protection Components
  23. Chapter 21 - ANN Application to Modelling of the D/A and A/D Interface for Mixed-mode Behavioural Simulation
  24. Chapter 22 - Electronic Circuits Diagnosis using Artificial Neural Networks
  25. Chapter 23 - Integration Verification in System on Chips Using Formal Techniques
  26. Chapter 24 - Test Generation based on CLP
  27. Chapter 25 - New Concepts of Asynchronous Circuits Worst-case Delay and Yield Estimation
  28. Chapter 26 - Neuron Network Applied to Video Encoder
  29. Chapter 27 - Single Photon Eigen-Problem with Complex Internal Dynamics