Handbook of Photomask Manufacturing Technology
eBook - ePub

Handbook of Photomask Manufacturing Technology

  1. 728 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

Handbook of Photomask Manufacturing Technology

About this book

As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it becomes increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to achieving this goal. Although brief overviews of photomask technology exist in the literature, the Handbook of Photomask Manufacturing Technology is the first in-depth, comprehensive treatment of existing and emerging photomask technologies available. The Handbook of Photomask Manufacturing Technology features contributions from 40 internationally prominent authors from industry, academia, government, national labs, and consortia. These authors discuss conventional masks and their supporting technologies, as well as next-generation, non-optical technologies such as extreme ultraviolet, electron projection, ion projection, and x-ray lithography. The book begins with an overview of the history of photomask development. It then demonstrates the steps involved in designing, producing, testing, inspecting, and repairing photomasks, following the sequences observed in actual production. The text also includes sections on materials used as well as modeling and simulation. Continued refinements in the photomask-making process have ushered in the sub-wavelength era in nanolithography. This invaluable handbook synthesizes these refinements and provides the tools and possibilities necessary to reach the next generation of microfabrication technologies.

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Yes, you can access Handbook of Photomask Manufacturing Technology by Syed Rizvi in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Cover
  2. Half Title
  3. Title Page
  4. Copyright Page
  5. Dedication
  6. Foreword
  7. Preface
  8. About the Editor
  9. Acknowledgments
  10. List of Contributors
  11. About the Book
  12. Section I: Introduction
  13. Section II: Mask Writing
  14. Section III: Optical Masks
  15. Section IV: NGL Masks
  16. Section V: Mask Processing, Materials, and Pellicles
  17. Section VI: Mask Metrology, Inspection, Evaluation, and Repairs
  18. Section VII: Modeling and Simulation
  19. Index