
- 266 pages
- English
- ePUB (mobile friendly)
- Available on iOS & Android
Stress and Strain Engineering at Nanoscale in Semiconductor Devices
About this book
Anticipating a limit to the continuous miniaturization (More-Moore), intense research efforts are being made to co-integrate various functionalities (More-than-Moore) in a single chip. Currently, strain engineering is the main technique used to enhance the performance of advanced semiconductor devices. Written from an engineering applications standpoint, this book encompasses broad areas of semiconductor devices involving the design, simulation, and analysis of Si, heterostructure silicongermanium (SiGe), and III-N compound semiconductor devices. The book provides the background and physical insight needed to understand the new and future developments in the technology CAD (TCAD) design at the nanoscale.
Features
- Covers stressstrain engineering in semiconductor devices, such as FinFETs and III-V Nitride-based devices
- Includes comprehensive mobility model for strained substrates in global and local strain techniques and their implementation in device simulations
- Explains the development of strain/stress relationships and their effects on the band structures of strained substrates
- Uses design of experiments to find the optimum process conditions
- Illustrates the use of TCAD for modeling strain-engineered FinFETs for DC and AC performance predictions
This book is for graduate students and researchers studying solid-state devices and materials, microelectronics, systems and controls, power electronics, nanomaterials, and electronic materials and devices.
Frequently asked questions
- Essential is ideal for learners and professionals who enjoy exploring a wide range of subjects. Access the Essential Library with 800,000+ trusted titles and best-sellers across business, personal growth, and the humanities. Includes unlimited reading time and Standard Read Aloud voice.
- Complete: Perfect for advanced learners and researchers needing full, unrestricted access. Unlock 1.4M+ books across hundreds of subjects, including academic and specialized titles. The Complete Plan also includes advanced features like Premium Read Aloud and Research Assistant.
Please note we cannot support devices running on iOS 13 and Android 7 or earlier. Learn more about using the app.
Information
Table of contents
- Cover
- Half Title
- Title Page
- Copyright Page
- Dedication
- Table of Contents
- Preface
- Author Biography
- Chapter 1: Introduction
- Chapter 2: Simulation Environment
- Chapter 3: Stress Generation Techniques in CMOS Technology
- Chapter 4: Electronic Properties of Engineered Substrates
- Chapter 5: Bulk-Si FinFETs
- Chapter 6: Strain-Engineered FinFETs at NanoScale
- Chapter 7: Technology CAD of III-Nitride Based Devices
- Chapter 8: Strain-Engineered SiGe Channel TFTs for Flexible Electronics
- Index