Optical Scattering: Measurement and Analysis, Third Edition
eBook - PDF

Optical Scattering: Measurement and Analysis, Third Edition

  1. English
  2. PDF
  3. Available on iOS & Android
eBook - PDF

Optical Scattering: Measurement and Analysis, Third Edition

About this book

The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and particles as well as the use of wafer scanners to locate and size isolated surface features. New sections cover the multimillion-dollar wafer scanner business, establishing that microroughness is the noise, not the signal, in these systems. Scatter measurements, now routinely used to determine whether small-surface features are pits or particles and inspiring new technology that provides information on particle material, are also discussed. These new capabilities are now supported by a series of international standards, and a new chapter reviews those documents. New information on scatter from optically rough surfaces has also been added. Once the critical limit is exceeded, scatter cannot be used to determine surface-roughness statistics, but considerable information can still be obtained - especially when measurements are made on mass-produced products. Changes in measurement are covered, and the reader will find examples of scatter measurements made using a camera for a fraction of the cost and in a fraction of the time previously possible. The idea of relating scatter to surface appearance is also discussed, and appearance has its own short chapter. After all, beauty is in the eye of the beholder, and what we see is scattered light.

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Yes, you can access Optical Scattering: Measurement and Analysis, Third Edition by Stover, John C. in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Optics & Light. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Table of Contents
  2. List of Acronyms
  3. Chapter 1 Quantifying Light Scatter
  4. Chapter 2 Quantifying Surface Roughness
  5. Chapter 3 Scatter Calculations and Diffraction Theory
  6. Chapter 4 Using Rayleigh-Rice to Calculate Smooth-Surface Statistics from the BRDF
  7. Chapter 5 Polarization of Scattered Light
  8. Chapter 6 Scattering Models for Discrete Surface Features
  9. Chapter 7 Instrumentation and Measurement Issues
  10. Chapter 8 Predicting Scatter from Roughness
  11. Chapter 9 Detection of Discrete Defects
  12. Chapter 10 Appearance and Scattered Light
  13. Chapter 11 Industrial Applications
  14. Chapter 12 Published Scatter Standards
  15. Chapter 13 Scatter Specifications
  16. Appendix A Review of Electromagnetic Wave Propagation
  17. Appendix B Kirchhoff Diffraction from Sinusoidal Gratings
  18. Appendix C BSDF Data
  19. Appendix D Units
  20. References
  21. Index
  22. About the Author