Image Formation in Low-Voltage Scanning Electron Microscopy
eBook - PDF

Image Formation in Low-Voltage Scanning Electron Microscopy

  1. 158 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Image Formation in Low-Voltage Scanning Electron Microscopy

About this book

While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions.

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Table of contents

  1. Contents
  2. Preface
  3. List of Symbols and Acronyms
  4. 1 Introduction
  5. 2 Electron Optics and Instrumentation
  6. 3 Electron Scattering and Diffusion
  7. 4 Backscattered and Secondary-Electron Emission
  8. 5 Specimen Charging and Damage
  9. 6 Signal Formation and Image Contrast
  10. Electron Spectroscopic Methods
  11. Summary
  12. Bibliography
  13. Subject Index
  14. About the Author

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Yes, you can access Image Formation in Low-Voltage Scanning Electron Microscopy by Reimer, Ludwig in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Science History & Practice. We have over one million books available in our catalogue for you to explore.