Molecular Theory of Lithography
eBook - PDF

Molecular Theory of Lithography

  1. English
  2. PDF
  3. Available on iOS & Android
eBook - PDF

Molecular Theory of Lithography

About this book

This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithographic process, as well as for advanced lithographic imaging mechanisms, including photochemical and radiochemical, imprint, and directed block copolymer self-assembly imaging mechanisms. The book is intended for students and professionals whose knowledge of lithography extends to the chemistry and physics underlying its various forms. A familiarity with chemical kinetics, thermodynamics, statistical mechanics, and quantum mechanics will be helpful, as will be familiarity with elementary concepts in physics such as energy, force, electrostatics, electrodynamics, and optics.

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Yes, you can access Molecular Theory of Lithography by Okoroanyanwu, Uzodinma in PDF and/or ePUB format, as well as other popular books in Physical Sciences & Industrial & Technical Chemistry. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Table of Contents
  2. Preface
  3. Acronyms and Abbreviations
  4. Chapter 1: Overview of Lithography
  5. Chapter 2: Theory of the LithographicProcess
  6. Chapter 3: Theory of MolecularInteractions in Lithography
  7. Chapter 4: Theory of Photochemical andRadiochemical LithographicImaging Mechanisms
  8. Chapter 5: Theory of Block CopolymerSelf-assembly LithographicImaging Mechanisms
  9. Chapter 6: Theory of Imprint LithographicImaging Mechanisms
  10. Index