eBook - PDF
Reliability of MEMS
Testing of Materials and Devices
- 325 pages
- English
- PDF
- Available on iOS & Android
eBook - PDF
Reliability of MEMS
Testing of Materials and Devices
About this book
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
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Information
Table of contents
- Title Page
- Contents
- Preface
- Foreword
- List of Contributors
- Overview
- 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization
- 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating – Substrate Systems
- 3 Thin film Characterization Using the Bulge Test
- 4 Uniaxial Tensile Test for MEMS Materials
- 5 On chip Testing of MEMS
- 6 Reliability of a Capacitive Pressure Sensor
- 7 Inertial Sensors
- 8 High accuracy, High reliability MEMS Accelerometer
- 9 Reliability of MEMS Variable Optical Attenuator
- 10 Eco Scan MEMS Resonant Mirror
- Index
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Yes, you can access Reliability of MEMS by Osamu Tabata, Toshiyuki Tsuchiya, Osamu Tabata,Toshiyuki Tsuchiya, Oliver Brand,Gary K. Fedder,Christofer Hierold,Jan G. Korvink in PDF and/or ePUB format, as well as other popular books in Technologie et ingénierie & Science des matériaux. We have over 1.5 million books available in our catalogue for you to explore.