MEMS Silicon Oscillating Accelerometers and Readout Circuits
eBook - PDF

MEMS Silicon Oscillating Accelerometers and Readout Circuits

  1. 225 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

MEMS Silicon Oscillating Accelerometers and Readout Circuits

About this book

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

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Yes, you can access MEMS Silicon Oscillating Accelerometers and Readout Circuits by Yong Ping Xu in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Front Cover
  2. Half Title Page
  3. RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS
  4. Title Page
  5. Copyright Page
  6. Contents
  7. Preface
  8. List of Contributors
  9. List of Figures
  10. List of Tables
  11. List of Abbreviations
  12. List of Notations
  13. Chapter 1 - Mechanical Design of Micromechanical Silicon Oscillating Accelerometer
  14. Chapter 2 - Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers
  15. Chapter 3 - MEMS Silicon Oscillating Accelerometer Readout Circuit
  16. Chapter 4 - An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter
  17. Chapter 5 - A System-decomposition Model for MEMS Silicon Oscillating Accelerometer
  18. Chapter 6 - Resonant Seismic Sensor
  19. Index
  20. About the Editor
  21. Back Cover