4M 2008

Proceedings of the 4th International Conference on Multi-Material Micro Manufacture

Stephan Dimov, Wolfgang Menz, Stephan Dimov, Wolfgang Menz

• Publisher: Whittles Publishing
• Year: 2008
• Print ISBN: 9781904445760
• eBook ISBN: 9781849954136
• Topic: Tecnología e ingeniería
• Subtopic: Ingeniería industrial

4M 2008, the fourth annual conference of the 4M Network of Excellence (www.4m-net.org), will be held on 9th - 11th of September 2008 at Cardiff, UK. There will be 73 accepted papers including 4 keynote contributors involving more than 200 authors from 16 countries and 46 organisations.This resulting volume details the state-of-the-art regarding numerous aspects of advanced micro technologies with respect to a wide range of materials, and the development of new production platforms for micro systems-based products.The contributions from leading authors from universities, independant research and corporate organizations provide an invaluable overview of this rapidly moving subject and an insight into key research and development areas. This comprehensive collection of indexed and peer-reviewed articles is also contained on a CD with search functionality.

Table of contents

• Title page
• Preface
• Conference committee
• Contents
• 4M Network of Excellence, Progress Report 2006-2008
• Traceable measurement of areal surface texture
• Biphasic reactions in microreactors
• Microfabrication using a Single Mode Yb Fiber Laser
• Utilising Electrochemical Deposition for Micro Manufacturing
• Engineered Self-assembly From Nano to Milli Scales
• The integration of mono-crystalline silicon micro-mirrors on CMOS for SLM applications
• Batch Fabrication Methods for Polymer Based Active Microsystems using Hot Embossing and Transfer Bonding Technologies
• Wafer-scale manufacturing of robust trimorph bulk SMA microactuators
• Material aspects for batch integration of PZT thin films using transfer bonding technologies – Q2M development
• Towards Batch Integration of SMA into Microsystems: An Actuator Prototype
• Fabrication of piezoelectric thick-film bimorph micro-actuators from bulk ceramics using batch-scale methods
• A new tool for aligned micro-embossing and nano-imprinting
• Ultrasonic welding of micro plastic parts
• Manufacturing of Versatile Ceramic or Metal Micro Components by Powder Injection Moulding
• High Density Interconnections Fabrication by UV Lasers Microprocessing of Microvias and Microstructures
• Single- and multi-layer conductive patterns fabricated using M3D technology
• Wafer-scale transfer of nanoimprinted pattern into silicon substrates
• Large-area metal-coated dielectric nanopillar array for excitation of surface plasmon resonance
• Fabrication of stainless steel micro components using softlithography
• Concept for Packaging of a Silicon based Biochip
• Flexible microfluidics based on commercial SU8 foils
• Microfabrication of Components for a Novel Biomimetic Neurological Endoscope
• Investigation of Material Compatibility for Embedding Stereolithography
• Electric fields in a hybrid batch fluidic micromanipulation concept
• Concept for Fluidic Self-Assembly of Micro-Parts Using Electro-Static Forces
• Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring
• Manufacturing and replication of cell aligning micro structures
• X-ray pattern analysis of electroplated two-component moulds used for the production of micro gear wheels
• Measurement of frequency response of the bone ossicles in the sheep middle ear by the fiber-optic microphone
• How reliable are surface roughness measurements of micro-features? - Experiences of a Round Robin test within nine 4M laboratories
• Micro-ultrasonic metrology of multi-material electronic devices
• Approaching a sub-micron capability index using a Werth Fibre Probe System WFP
• Micromachined silicon electrodes for electrochemical micromachining
• Dielectric properties of hydroxyapatite based ceramics
• Micro Electrical Discharge Machining of Si3N4-based Ceramic Composites
• Machining of polystyrene by UV laser radiation for patch clamping device fabrication
• DRIE of non-conventional materials: first results
• Carbon nanotubes grown directly on printed electrode of electrochemical sensor
• An analysis of the effects of nanolayered nitride coatings on the lifetimes and wear of tungsten carbide micromilling tools
• Micromachining of amorphous and crystalline Ni78B14Si8 alloys using micro-second and pico-second lasers
• FT-IR study of nanosurface phenomena
• Micro-extrusion of an ultrafine grained copper can
• Investigation of the mechanical behaviour of thin metal sheets using the hydraulic bulge test
• 3D micro and nanostructuring of an epoxy based resist by electron beam lithography
• Explosive welding of Ni- based amorphous foils for micro-tooling applications
• Process characterisation including process chains
• Hot embossing of high aspect ratio sub-μm structured surfaces for micro fluidic applications
• Influence of process parameter variation on ceramic feedstock flow behaviour
• Micro injection moulding: an experimental study on the relationship between the filling of micro parts and runner designs
• A study of factors affecting the performance of micro square endmills in milling of hardened tool steels
• Manufacturing and verification of tools for ECF
• Electrochemical finishing of nickel microstructures
• Wire electro discharge grinding: surface finish optimisation
• Improved bonding strength in hybrid micro parts by using plasma
• Force analysis in micro milling Al 6082 T6 in various engagement conditions
• Micro-Injection moulding: surface treatment effects on part demoulding
• Strategies for material removal in laser milling
• Investigations in Variothermal Injection Moulding of Microstructures and Microstructured Surfaces
• TEM/SEM and FT-IR characterization of biocompatible magnetic nanoparticles
• Template fabrication incorporating different length scale features
• Process modelling and simulation
• Micro injection moulding: simulation of melt flow behaviour
• Implementation strategies for the optimization of micro injection moulding simulations
• Geometry Optimization of Micro Milling Tools
• On the force between two metallic plates of a gripper immersed in a nonpolar fluid
• А study of the gate size effects on the process of optical data storage micro-scale replication
• Numerical modelling and experimental characterization of short pulse laser microforming of thin metal sheets
• Modelling the Solidification-Structure of Al Micro-Castings as a function of their Aspect Ratio and Mould Pouring Temperature
• Simulation of Microforming Processes by Applying a Mesoscopic Model
• Influence of Force Components on Thin Wire EDM
• Systems: novel product and system designs
• An integrated all-optical microfluidic particle sorter
• Feasibility of polymers for wafer scale capping of RF MEMS
• Sub-Micron Referencing System for Ultraprecision Machining Processes
• Active microvalves for micro-fluidic networks in plastics – selecting suitable actuation schemes
• Low-power humidity sensor for RFID applications
• author index
• subject index