Electromechanics and MEMS

Thomas B. Jones, Nenad G. Nenadic

• Publisher: Cambridge University Press
• Year: 2013
• Print ISBN: 9780521764834
• eBook ISBN: 9781139602877
• Topic: Technology & Engineering
• Subtopic: Electrical Engineering & Telecommunications
• Index: Technology & Engineering

Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.

Table of contents

• Contents
• Preface
• 1 Introduction
• 2 Circuit-based modeling
• 3 Capacitive lumped parameter electromechanics
• 4 Small-signal capacitive electromechanical systems
• 5 Capacitive sensing and resonant drive circuits
• 6 Distributed 1-D and 2-D capacitive electromechanical structures
• 7 Practical MEMS devices
• 8 Electromechanics of piezoelectric elements
• 9 Electromechanics of magnetic MEMS devices
• A Review of quasistatic electromagnetics
• B Review of mechanical resonators
• C Micromachining
• D A brief review of solid mechanics
• Index