- 896 pages
- English
- ePUB (mobile friendly)
- Available on iOS & Android
eBook - ePub
Handbook of Silicon Semiconductor Metrology
About this book
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
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Information
Subtopic
Materials ScienceTable of contents
- Cover
- Half Title
- Title Page
- Copyright Page
- Dedication
- Preface
- Acknowledgments
- Table of Contents
- Contributors
- Handbook of Silicon Semiconductor Metrology
- Index
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Yes, you can access Handbook of Silicon Semiconductor Metrology by Alain C. Diebold in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Materials Science. We have over 1.5 million books available in our catalogue for you to explore.