eBook - ePub
Laser Annealing Processes in Semiconductor Technology
Theory, Modeling and Applications in Nanoelectronics
- 426 pages
- English
- ePUB (mobile friendly)
- Available on iOS & Android
eBook - ePub
Laser Annealing Processes in Semiconductor Technology
Theory, Modeling and Applications in Nanoelectronics
About this book
Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.
- Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena
- Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations
- Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors
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Information
Table of contents
- Cover
- Front Matter
- Table of Contents
- Copyright
- Contributors
- Preface
- List of Illustrations
- List of Tables
- Chapter 1 : Historical evolution of pulsed laser annealing for semiconductor processing
- Chapter 2 : Laser-matter interactions
- Chapter 3 : Atomistic modeling of laser-related phenomena
- Chapter 4 : Laser annealing applications for semiconductor devices manufacturing
- Chapter 5 : Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors
- Chapter 6 : Continuum modeling and TCAD simulations of laser-related phenomena in CMOS applications
- Chapter 7 : Laser engineering of carbon materials for optoelectronic applications
- Chapter 8 : Optical hyperdoping
- Chapter 9 : Laser ultra-doped silicon: Superconductivity and applications
- Index
- A
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Yes, you can access Laser Annealing Processes in Semiconductor Technology by Fuccio Cristiano,Antonino La Magna in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over 1.5 million books available in our catalogue for you to explore.