Principles of Plasma Discharges and Materials Processing
eBook - ePub

Principles of Plasma Discharges and Materials Processing

  1. English
  2. ePUB (mobile friendly)
  3. Available on iOS & Android
eBook - ePub

Principles of Plasma Discharges and Materials Processing

About this book

A new edition of this industry classic on the principles of plasma processing

Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential.

Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields.

Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find:

  • Extensive figures and tables to facilitate understanding
  • A new chapter covering the recent development of processes involving high-pressure capacitive discharges
  • New subsections on discharge and processing chemistry, physics, and diagnostics

Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.

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Yes, you can access Principles of Plasma Discharges and Materials Processing by Michael A. Lieberman,Allan J. Lichtenberg in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Atomic & Molecular Physics. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Cover
  2. Table of Contents
  3. Title Page
  4. Copyright
  5. Dedication
  6. List of Figures
  7. List of Tables
  8. Preface to Third Edition
  9. Preface to Second Edition
  10. Preface to the First Edition
  11. Symbols, Abbreviations, and Acronyms
  12. 1 Introduction
  13. 2 Basic Plasma Equations and Equilibrium
  14. 3 Atomic Collisions
  15. 4 Plasma Dynamics
  16. 5 Diffusion and Transport
  17. 6 DC Sheaths
  18. 7 Chemical Reactions and Equilibrium
  19. 8 Molecular Collisions
  20. 9 Chemical Kinetics and Surface Processes
  21. 10 Particle and Energy Balance in Discharges
  22. 11 Low-Pressure Capacitive Discharges
  23. 12 Inductive Discharges
  24. 13 Wave-Heated Discharges
  25. 14 DC Discharges
  26. 15 High-Pressure Capacitive Discharges
  27. 16 Etching
  28. 17 Deposition and Implantation
  29. 18 Dusty Plasmas
  30. 19 Kinetic Theory of Discharges
  31. Appendix A: Collision Dynamics
  32. Appendix B: The Collision Integral
  33. Appendix C: Diffusion Solutions for Variable Mobility Model
  34. References
  35. Index
  36. End User License Agreement