eBook - ePub

Run-to-Run Control in Semiconductor Manufacturing

Name: Run-to-Run Control in Semiconductor Manufacturing
ISBN: 9781351836128

James Moyne,

Enrique del Castillo,

Arnon M. Hurwitz,

368 pages
English
ePUB (mobile friendly)
Available on iOS & Android

eBook - ePub

Run-to-Run Control in Semiconductor Manufacturing

James Moyne,

Enrique del Castillo,

Arnon M. Hurwitz,

About this book

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs, " thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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Yes, you can access Run-to-Run Control in Semiconductor Manufacturing by James Moyne,Enrique del Castillo,Arnon M. Hurwitz in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Industrial Engineering. We have over one million books available in our catalogue for you to explore.