Handbook of Thin Film Deposition
eBook - ePub

Handbook of Thin Film Deposition

Theory, Technology and Semiconductor Applications

  1. 600 pages
  2. English
  3. ePUB (mobile friendly)
  4. Available on iOS & Android
eBook - ePub

Handbook of Thin Film Deposition

Theory, Technology and Semiconductor Applications

About this book

Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry.  When pursuing patents, there is a phase called 'reduction to practice' where the idea for a technology transitions from a concept to actual use. The section 'Thin Film Reduction to Practice' includes chapters that review the most relevant methods to fabricate thin films towards practical applications. Then, the latest applications of thin film deposition technologies are discussed.  Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists and engineers in academia and working in semiconductor R&D.  - Offers a practical survey of thin film technologies including design, fabrication, and reliability - Covers core processes and applications in the semiconductor industry and discusses latest advances in new thin film development - Features new chapters that review methods on front-end and back-end thin films

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Yes, you can access Handbook of Thin Film Deposition by Dominic Schepis,Krishna Seshan in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Materials Science. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Handbook of Thin Film Deposition
  2. Chapter 1 The role of thin films in nanotechnology
  3. Chapter 2 Process integration for on-chip interconnects
  4. Chapter 3 Sputter processing
  5. Chapter 4 Epitaxial growth processes for high performance advanced CMOS devices
  6. Chapter 5 Equipment and manufacturability issues in chemical vapor deposition processes
  7. Chapter 6 CMP: Scaling down and stacking up: How the trends in semiconductors are affecting chemical-mechanical planarization
  8. Chapter 7 Limits of gate dielectrics scaling
  9. Chapter 8 Semiconductor reliability overview
  10. Chapter 9 Thin film development for LED technologies
  11. Chapter 10 Emerging ferroelectric thin films: Applications and processing
  12. Chapter 11 Thin films in semiconductor memory
  13. Chapter 12 Yield impact of defects from thin films and other processing steps
  14. Summary
  15. Index