eBook - PDF

Post-Processing Techniques for Integrated MEMS

234 pages
English
PDF
Available on iOS & Android

eBook - PDF

Post-Processing Techniques for Integrated MEMS

About this book

This groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240 illustrations, the book details a modular integration process that won't modify the electronics fabrication process or impose any limitation for optimizing the physical properties of the MEMS structural layers.

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Yes, you can access Post-Processing Techniques for Integrated MEMS by in PDF and/or ePUB format. We have over one million books available in our catalogue for you to explore.