Microelectromechanical Systems
eBook - ePub

Microelectromechanical Systems

Advanced Materials and Fabrication Methods

,
  1. English
  2. ePUB (mobile friendly)
  3. Available on iOS & Android
eBook - ePub

Microelectromechanical Systems

Advanced Materials and Fabrication Methods

,

About this book

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.

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Table of contents

  1. COVER PAGE
  2. COMMITTEE ON ADVANCED MATERIALS AND FABRICATION METHODS FOR MICROELECTROMECHANICAL SYSTEMS
  3. NATIONAL MATERIALS ADVISORY BOARD
  4. Acknowledgments
  5. Preface
  6. Contents
  7. Tables, Figures, and Boxes
  8. Acronyms
  9. Executive Summary
  10. 1 Background
  11. 2 INTEGRATED CIRCUIT-BASED FABRICATION Technologies and Materials
  12. 3 NEW MATERIALS AND PROCESSES
  13. 4 Designing Microelectromechanical Systems
  14. 5 Assembly, Packaging, and Testing
  15. References
  16. APPENDICES