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About this book
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
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Yes, you can access MEMS by Mohamed Gad-el-Hak in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Civil Engineering. We have over one million books available in our catalogue for you to explore.
Information
Table of contents
- Cover Page
- Halftitle Page
- Mechanical Engineering Series Frank Kreith and Roop Mahajan - Series Editors
- Title Page
- Copyright Page
- Preface
- Editor-in-Chief
- Contributors
- Table of Contents
- 1: Introduction
- 4: LIGA and Micromolding
- 5: X-Ray-Based Fabrication
- 6: EFAB TM Technology and Applications
- 7: Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability
- 8: Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide
- 9: Polymer Microsystems: Materials and Fabrication
- 10: Optical Diagnostics to Investigate the Entrance Length in Microchannels
- 11: Microfabricated Chemical Sensors for Aerospace Applications
- 12: Packaging of Harsh Environment MEMS Devices
- 13: Fabrication Technologies for Nanoelectromechanical Systems
- 14: Molecular Self-Assembly: Fundamental Concepts and Applications
- Index