Micro Electromechanical Systems (MEMS)
eBook - PDF

Micro Electromechanical Systems (MEMS)

Practical Lab Manual

  1. 203 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Micro Electromechanical Systems (MEMS)

Practical Lab Manual

About this book

Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices

Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.

The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.

The book covers additional topics such as:

  • Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation
  • Simulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing
  • X-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy
  • Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field

A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.

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Yes, you can access Micro Electromechanical Systems (MEMS) by Sanket Goel in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Electrical Engineering & Telecommunications. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Cover
  2. Series Page
  3. Title Page
  4. Copyright Page
  5. Contents
  6. About the Editor
  7. List of Contributors
  8. Preface
  9. About the Companion Website
  10. Chapter 1 Multiphysics Simulations on the Effect of Fluidic Concentration Profiles Over Y-Channel andT-Channel Designs
  11. Chapter 2 Droplet Generation in T-Junction Microchannel Using Multiphysics Software
  12. Chapter 3 Cleanroom-Assisted and Cleanroom-Free Photolithography
  13. Chapter 4 Additive Manufacturing (3D Printing)
  14. Chapter 5 Laser Processing
  15. Chapter 6 Soft Lithography: DLW-Based Microfluidic Device Fabrication
  16. Chapter 7 Electrode Fabrication Techniques
  17. Chapter 8 Morphological Characterization
  18. Chapter 9 Spectroscopic Characterization
  19. Chapter 10 Microfluidic Devices
  20. Chapter 11 Wearable Devices
  21. Chapter 12 Energy Devices
  22. Chapter 13 Conclusion and Future Outlook
  23. IEEE Press Series on Sensors
  24. Index
  25. EULA