MEMS and Nanotechnology, Volume 2

Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics

Tom Proulx

• Publisher: River Publishers
• Year: 2025
• eBook ISBN:
  9781040602973
• Topic: Technology & Engineering
• Index: Technology & Engineering

This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.

Table of contents

• Cover
• Series Page
• Title Page
• Copyright Page
• Preface
• Table of Contents
• 1 Nanomechanical Standards Based on the Intrinsic Mechanics of Molecules and Atoms
• 2 Magneto-mechanical MEMS Sensors for Bio-detection
• 3 Recent Progress of Piezoelectric MEMS for Energy Harvesting Devices
• 4 Performance of Piezoelectric Power Generator in Environmental Conditions
• 5 Comparison of Transduction Efficiency for Energy Harvester Between Piezoelectric Modes
• 6 Size Effects Associated With Microcompression Experiments on Single-Crystal Magnesium
• 7 Mechanically Probing Time-dependent Mechanics in Metallic MEMS
• 8 Small Mass Measurements for Tuning Fork-based Atomic Force Microscope Cantilever Spring Constant Calibration
• 9 Linear and Nonlinear Mass Sensing Using Piezoelectrically-actuated Microcantilevers
• 10 Calibrating Force and Displacement in the Face of Property Variation
• 11 Standardization of Nanoscale Interfacial Experiments Using MEMS
• 12 Arrays of Robust Carbon Nanotube-based NEMS: A Combined Experimental/Computational Investigation
• 13 Electro-mechanical Response of Carbon Nanotube Reinforced Polymer Composites
• 14 A Test Platform for Systematic Investigation of Tribology in MEMS
• 15 Full Optical Scatter Analysis for Novel Photonic and Infrared Metamaterials
• 16 Thermal Management and Metamaterials
• 17 MEMS Integrated Metamaterial Structure Having Variable Resonance for RF Applications
• 18 Characterization and Testing of Adaptive RF Metamaterial Structure Using MEMS
• 19 Design of a Microfluidic Pump, Based on Conducting Polymers
• 20 Micromotor Fabrication by Surface Micromachining Technique
• 21 Improvement of Piezoresistive Microcantilever Beams for Gas Detection and Sensing
• 22 Investigation of the Young's Modulus of Fibers in an Electrospun PCL Scaffold Using AFM and its Correlation to Cell Attachment
• 23 Recent Progress in E-Beam Lithography for SEM Patterning
• 24 Analysis of Scattering-type Scanning Near-field Optical Microscopy for Residual-strain Measurements
• 25 Experimental Methods for Tensile Testing of Metallic Thin Films at High Temperatures
• 26 Surface Texturing Using Gold Nanoparticles to Reduce Adhesion in MEMS
• 27 Design of Microswitch Systems Avoiding Stiction Due to Surface Contact
• 28 Measurement of Adhesive Force Between two Mica Surfaces With Multiple Beam Interferometry
• 29 Performance Studies of a Prototypical MEMS Thermal Actuator
• 30 A New Electrothermal Microactuator With Z-shaped Beams
• 31 Electrothermal Actuators for Integrated MEMS Safe and Arming Devices
• 32 Contrast Reversal on Surface Plasmon Resonance Reflectivity in Nickel and Nickel Alloy Films
• 33 Effect of Accelerated Ultra Violet and Thermal Exposure on Nano Scale Mechanical Properties of Nylon Fibers
• 34 High Thermal Conductivity Polyurethane-Boron Nitride Nanocomposite Encapsulants
• 35 Advanced Hard Mask Approach of ICs Copper Interconnects Processes Integration
• 36 Advances in Thin Film Nanoindentation
• 37 Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications
• 38 Fracture Between Self-assembled Monolayers
• 39 Control and Quantification of Residual Stresses in Anodically Bonded MEMS Structures
• 40 Sub-micron Scale Mechanical Properties of Polypropylene Fibers Exposed to Ultraviolet and Thermal Degradation