Manufacturing Techniques for Microfabrication and Nanotechnology
eBook - PDF

Manufacturing Techniques for Microfabrication and Nanotechnology

  1. 670 pages
  2. English
  3. PDF
  4. Available on iOS & Android
eBook - PDF

Manufacturing Techniques for Microfabrication and Nanotechnology

About this book

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d

Frequently asked questions

Yes, you can cancel anytime from the Subscription tab in your account settings on the Perlego website. Your subscription will stay active until the end of your current billing period. Learn how to cancel your subscription.
At the moment all of our mobile-responsive ePub books are available to download via the app. Most of our PDFs are also available to download and we're working on making the final remaining ones downloadable now. Learn more here.
Perlego offers two plans: Essential and Complete
  • Essential is ideal for learners and professionals who enjoy exploring a wide range of subjects. Access the Essential Library with 800,000+ trusted titles and best-sellers across business, personal growth, and the humanities. Includes unlimited reading time and Standard Read Aloud voice.
  • Complete: Perfect for advanced learners and researchers needing full, unrestricted access. Unlock 1.4M+ books across hundreds of subjects, including academic and specialized titles. The Complete Plan also includes advanced features like Premium Read Aloud and Research Assistant.
Both plans are available with monthly, semester, or annual billing cycles.
We are an online textbook subscription service, where you can get access to an entire online library for less than the price of a single book per month. With over 1 million books across 1000+ topics, we’ve got you covered! Learn more here.
Look out for the read-aloud symbol on your next book to see if you can listen to it. The read-aloud tool reads text aloud for you, highlighting the text as it is being read. You can pause it, speed it up and slow it down. Learn more here.
Yes! You can use the Perlego app on both iOS or Android devices to read anytime, anywhere — even offline. Perfect for commutes or when you’re on the go.
Please note we cannot support devices running on iOS 13 and Android 7 or earlier. Learn more about using the app.
Yes, you can access Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Madou in PDF and/or ePUB format, as well as other popular books in Technology & Engineering & Industrial Engineering. We have over one million books available in our catalogue for you to explore.

Table of contents

  1. Front Cover
  2. Contents
  3. Roadmap
  4. Author
  5. Acknowledgments
  6. Chapter 1: Photolithography
  7. Chapter 2: Next-Generation Lithographies and Lithography Research
  8. Chapter 3: Dry Etching
  9. Chapter 4: Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools
  10. Chapter 5: Thermal Energy-Based Removing
  11. Chapter 6: Mechanical Energy-Based Removing
  12. Chapter 7: Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining
  13. Chapter 8: Chemical, Photochemical, and Electrochemical Forming Techniques
  14. Chapter 9: Thermal Energy-Based Forming Techniques—Thermoforming
  15. Chapter 10: Micromolding Techniques—LIGA
  16. Back Cover